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JIS B 9920-2:2019 describes the monitoring to assure that a cleanroom or clean zone performs and maintains the required control of air cleanliness by particle concentration. Also, this Standard specifies minimum requirements for a monitoring plan for cleanroom or clean zone performance related to air cleanliness by particle concentration, based upon parameters that measure or affect airborne particle concentration.
Product Details
- Published:
- 01/01/2019
- Number of Pages:
- 21
- File Size:
- 1 file , 180 KB
