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This Recommended Practice (RP) addresses the sizing and counting of submicrometer liquid-borne particles using optical discrete-partical counters with a focus on applications in the semiconductor, flat-panel display, and data storage industries. Liquid-borne particle measurement involves many technical challenges that can substantially affect results in both sizing and counting of particles. This RP is intended as a single source covering those challenges and solutions and provides a handy reference for professionals in this field.
Product Details
- Published:
- 10/01/2011
- ISBN(s):
- 9780915414475, 9780915414093
- Number of Pages:
- 32
- File Size:
- 1 file , 1.2 MB
