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This RP provides a uniform method and basis for determining the rate of deposition of nonvolatile residue (NVR) on surfaces in cleanrooms. In the design of the heating, ventilating, and air conditioning system, the selection of suitable filters, and the selection of materials used in the construction of the cleanroom, the requirements for the rate of deposition of NVR should be specified by the user. Designers of cleanrooms should consider the maximum deposition rates suggested by This RP when the deposition of NVR can affect the performance of products.
Product Details
- Published:
- 04/01/2006
- ISBN(s):
- 9781877862281
- Number of Pages:
- 20
- File Size:
- 1 file , 680 KB
