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This RP provides standardized test procedures for determining cleanroom and clean zone performance. It is intended to assist with preparing detailed specifications for cleanroom procurement and for assuring operational compliance. Performance tests are recommended for cleanrooms in three operational phases. Data gathered through testing can be used to establish baselines, track trends, and justify repairs. The test methods may also be used for periodic monitoring of cleanroom performance.
Product Details
- Published:
- 08/01/2004
- ISBN(s):
- 9780978786892
- Number of Pages:
- 27
- File Size:
- 1 file , 940 KB
