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This Guideline provides information for designing filtration systems to eliminate trace amounts (less than 1 ppmv) of airborne molecular contamination (AMC) from the air supplied to cleanrooms and other controlled environments. The document covers applications, potential points of use, filtration methods, construction materials, performance comparison, and follow-up assessment. Also discussed are secondary impacts of the filters on the HVAC system and exterior impacts on the filtration system.
Product Details
- Published:
- 07/01/2009
- ISBN(s):
- 9780978786885
- Number of Pages:
- 24
- File Size:
- 1 file , 600 KB
